關(guān)于AMC污染控制方案關(guān)于AMC污染控制方案，我方認(rèn)為從以下幾點(diǎn)來控制1、 所用材料選用不產(chǎn)AMC污染的材料，如環(huán)氧采用無溶劑的材料，密封膠采用無硅密封膠；2、 加強(qiáng)新風(fēng)空調(diào)箱的防治措施，增加水洗和化學(xué)過濾段；3、加強(qiáng)對(duì)AMC污染敏感區(qū)域（如光刻區(qū)）的空調(diào)控制，包括該區(qū)域的正壓，密封，選用的過濾器形式等。TheAMCshouldreducethecleanroomtocontrolthefollowingfouraspects:（減少潔凈室內(nèi)的AMC應(yīng)從以下四個(gè)方面進(jìn)行控制）ControlCleanroomAMCgeneration:（控制室內(nèi)產(chǎn)生）ControlofoutdoorAMCintrusion:（控制室外侵入）ControltheAMCdiffusion:（控制擴(kuò)散）ChemicalFiltrationRemoveAMC:（化學(xué)過濾）ControlCleanroomAMCgeneration:ASTM-E595zerooutgassingtestEPOXY OutgassingImprovedbuildingmaterialsprocessingtechnologytoimprovetheprecisionengineeringasmuchaspossiblewithoutsealantAnti-staticcoating OutgassingTheULPAfiltershouldbeusedTeflon（PTFE）orlow-boronglassfiberswithloworganicproduction■SAP^?TheULPAfiltershouldbeusedTefloni(PTFE)orlow-boronglassfiberswiihloworganicproductsn■SAP^?TheULPAfiltershouldbeusedTefloni(PTFE)orlow-boronglassfiberswiihloworganicproductsnASTM-E595zerooutgassingtest(SkIadd)?FirstofallcleanroansoaceshouldbesealedsothatAMCdoesnotpenetratethesurrQundirigenvironmentcleanroom2.MAJtosettheAirwasherandappropriazechemicalfilters?Secondly,wsshouldoreven:outsideairenteringthecleanroomintheAMC,forwhichtherearetaoaspectstoconsider1.Newairintakesshouldbereasonable,trytostayawayfromairventsan￡othersources?Improvedbuildingmaterialsprocessingtechnologytoimprovetheprecisionengineeringasmuchaspossiblewithoutsealant?Anti一staticcoating——OutgassingControlofoutdoorAMCintrusion:FirstofallcleanroomspaceshouldbesealedsothatAMCdoesnotpenetratethesurroundingenvironmentcleanroom.Secondly,weshouldpreventoutsideairenteringthecleanroomintheAMC,forwhichtherearetwoaspectstoconsider1.Newairintakesshouldbereasonable,trytostayawayfromairventsandothersources2.MAUtosettheAirwasherandappropriatechemicalfiltersControltheAMCdiffusion:Mustmakeuseofchemicalsintheproductionprocessequipmentshouldbeconfinedtomeasuresandsetthereliableventilationtoreducethedistributionofchemicals必須使用的化學(xué)品在生產(chǎn)過程中設(shè)備應(yīng)密閉措施，并設(shè)置可靠的通風(fēng)，以減少化學(xué)品分散.Cleaningsystemshouldbedesignedtoreducetheflowcross-regional（清洗系統(tǒng)的設(shè)計(jì)應(yīng)減少跨區(qū)域流動(dòng))?必碩使用的比學(xué)品在生產(chǎn)過程中設(shè)備應(yīng)密閉措施>并設(shè)置可龍的通鳳>以減劌t學(xué)品価MustmakeuseofchemicalsintheprodoctionprocessequBpmentshouldbeconfinodtomeasuresandsetthereliableventilatiDntoreducethedistributionofchemicals命清洗系統(tǒng)的設(shè)計(jì)應(yīng)減少跨區(qū)域流動(dòng)Cleaningsystemshouldbedesignedtoreducetheflowcross-regionaChemicalFiltrationRemoveAMC:.AlthoughtheabovemeasurestakentoreducetheconcentrationofthecleanroomoftheAMC,butnotcompletelyeliminatetheproductionofAMC（盡管采取了上述措施，以減少潔凈室的AMC濃度，但不能完全消除生產(chǎn)的AMC）.AndsomeproductionprocessesandrelativelysensitivetotheAMC,someproductionareasshouldalsosetthechemicalfilterstoremovethecleanroomoftheAMC（和一些生產(chǎn)流程和比較敏感的AMC的，一些生產(chǎn)領(lǐng)域也應(yīng)設(shè)置過濾AMC的化學(xué)過濾器）

?盡管采取了上述措施*以減少潔淨(jìng)室的AMC濃度、但不能完全暗除生產(chǎn)的小CAlthoughtheabovemeasuresTakentoreduce:heconcentrationofthecleanroomof:heAMC,butnotcompletelyeliminate:heproductionofAMC?fCH些生產(chǎn)流程和tt粧敏感的AMC的■一些生產(chǎn)領(lǐng)域也應(yīng)設(shè)置測(cè)途潔掙室的AMC