ProductProductHPQ3vCGM-Introduction–HPQ3&CGM-TheHPQ3representthelatestinhighpressure;pumpfree,processRGAtechnology,withperformanceconsistentwithtraditionalRGAinstrumentation.Althoughdesignedtomeettherigorousrequirementsofsemiconductorprocessing,theHPQ3’sareidealforotherprocessmonitoringapplicationsbecausetheydonotrequireasupportpumpackage.Theresultingsystemislesscomplex,withreducedinstallationrequirements,offeringahigherlevelofreliabilityatasubstantiallylowercost.QULEECGM,RESIDUALGASYSIS/PROCESSGASMONITORCOMPACTPROCESSGAS“Qulee”(pronouncedas“KLEE”),isULVAC’slatestmodelforresidualgasysisandgasmonitoringduringprocess.Feedbackfromfacilityengineersinvariousproductionlinesareincorporatedinthenewproductdesignofferingutmostsimplicity.TheQuleeoffershighaccuracyandresolutionevenathighpressure(1Paorless).HPQ3ismoreHPQ3ismore1616digitalTTL ogOutputs0-10Voginput(0to10)X2,externalinterlockinput(pressure,protection)x1,Partialpressuresetpointoutputx2(fault,alarm),TotalEthernetEthernetNetworkcommunicationHPQ3STCP/IPSerialcommunication24VDC+/-10%5024VPowerMassRangeWhichMeansUniqueSellingPoints/4ogInputs-11Vsetpointoutputx2non-isolatedTTLinputs,contactclosure;2differentialoginputs,0–10VDCProductHPQ3vCGM-UniqueSellingPoints/WhichMeansMass1-50HPQ3100amu，所以如50amu051HPQ3Resolution(per1993AVSmendedPractice)1amuat10%peak無MassfilterDetectorFaradayFaradayElectron20to100HPQ3 的應MassPositionBetterthan+/-0.1amuover8hoursunderconstantconditions.無SensitivityAsFCat40eV/370>5E-5amps/TorrEM=N/A無MinimumDdetectablePartial8x10-11Torr(1.0x10-107.5x10-10HPQ310umOperating8mTorr(1x10-2mbar)forHPQ3SMaxpermissibleoppressure15mTCanwithstand40mTpressure1.5x10-2HPQ3具有更好的突發壓力上升時的PVDOperating10-40°C,80%RH(nonumSensorOperatingHPQ3cango80°CumBakeoutTemperature(electronicsPPMDetectableLimit(at1–5mTorrprocesspressure)無ProductHPQ3vCGM-SpecificationUniqueSellingPoints/WhichMeansLeakchecksocketwith這點在FPD更適合在FPDfilamenttripNo(Uses更長的使 TuneableIon無作的情況下，HPQ3照PM到來減少了停機的IonIonsourcepartof HPQ3燈可以拆卸更換 ProcessQuleeQCSVer3.0ProcessEye可以直接TOOLWebRGA顏分不同手動掃描TOOL無RGARGA數據與工藝設備操Chart,LeakCheckandRGA列表顯chamber窗口NOTES:Allspecificationsaftera30-minutewarm-up.MDPPiscalcul