利用晶體生長軟件FEMAG對藍寶石晶體生長的仿真計算方法CONFIDENTIALGeneralintroductionSapphireGrowthContentCONFIDENTIALIntroduction

Formorethan25years,FEMAGSoftdevelopssimulationsoftwarededicatedtotheresearchanddevelopmentofoptimalcrystalgrowthprocesses.1984 FirstresearchonGermaniumgrowthinUniversityofLouvain.

Prof.Fran?oisDupret1989 FirstresearchonSilicongrowthinUniversityofLouvain.1992 FirstcollaborationswithmajorICcompanies. Developmentofdefect-freesiliconwaferproduction.Today,morethan 35patentsarereferencingFEMAGSoftware2003 FEMAGSoftS.A.,spin-offfromUniversityofLouvain.2006 CollaboratrionwithmajorSolarcompanies. Developmentoflow-costandlow-oxygencontentprocesses.2009 Largeinvestmentforanewsoftwareframework 2010 ReleaseofSoftwareapplicationforSapphireingotproduction.CONFIDENTIALCzochralskiprocessCONFIDENTIALDirectionalSolidificationSystemCONFIDENTIALFloatingZoneProcessCONFIDENTIALSapphireGrowthbyCZandkyropoulosCONFIDENTIALSapphiregrowthbyHEM大家有疑問的，可以詢問和交流可以互相討論下，但要小聲點CONFIDENTIALWhatareFEMAGsoftware?Process-dedicatedsimulationtools,adaptedtoyourownprocessesandabletosolveyourproblems.Global

Allthefurnacecomponentsareconsidered.

Alltheheattransfermodeareconsidered(radiationtransfer,heatconduction,meltandgasconvection)InductionandohmicheatingTimeDependentCONFIDENTIALProcess-dedicatedtools

FEMAG-CZ :CzochralskiFEMAG-FZ :FloatingZoneFEMAG-VB :VerticalBridgmanFEMAG-CZ/OX :CzochralskiforSapphireFEMAG-KY :KyropoulosFEMAG-DS :DirectionalSolidificationFEMAG-HEM :HeatExchangeMethodGainoftime.ProcessmasteringAccurateandrighttothepointCONFIDENTIALPlatformorientedFRAMEWORK:FEMAG3RADIATIONCONVECTION…MESHGEOMETRYCONDUCTIONFEMAG-CZFEMAG-HEMFEMAG-DSFEMAG-KYROPOULOSFEMAG3NEW2011Veryaccurate:FiniteElementandSpectralmethodsVeryefficient:3Dsimulationsinless1dayVeryflexible:Veryfastdevelopmentofnewdemand

…CONFIDENTIALGlobalsimulations

CzochralskiFurnaceforSiliconHEMFurnaceforSapphireNosimplificationoftheprocessconditionsCONFIDENTIALDynamicsimulationsAdynamicsimulationtoolCompleteprocesssimulationDynamiceffectofinterfacedeformationVaryingprocessingconditions

CONFIDENTIALSapphireCrystalGrowthSimulation

CONFIDENTIALSapphireSimulationObjectiveThemarketofSapphireisexperiencingaveryfastgrowthrateandbecomeverycompetitiveManycompaniesinvestinsimulationsoftwareinordertoreinforcetheirpositionsHEM,CzochralskiandKyropoulosprocessrequireoptimizationandagoodunderstandingStrongneedforefficientnumericaltools.

Radiationeffectsintheparticipatingcrystalandmeltisacomplexproblem.CONFIDENTIALSapphireSimulationObjectiveOurgoalistoprovideaccurate

simulationtool,abletotakealltheprocessfeaturesintoaccountandtooptimize

thegrowthprocessintermsoftheresultingcrystalquality.CONFIDENTIALSapphireSimulationObjectiveKYROPULOSCZOCHRALSKIHEMCONFIDENTIALFEMAG-CZ/OXFEMAG-CZ/OXSoftwaretosimulateSapphireGrowthbyCZandKyropoulosSpecifications:Temperatureinthesapphireand

inallfurnacecomponentsbysolvingtheglobalheattransferinthefurnace(radiation,conduction,convection).Flowvelocityinthesapphireliquidphase.Crystallizationfrontshape

OhmicandInductionHeatingAdvancedradiationheattransferinthesapphireGasconvectionAnisotropicthermalstressesinthecrystalCONFIDENTIALTemperatureintheHotZoneFEMAG-CZ/OXCZprocess

withInductionHeatingsystemInductionHeating

systemCONFIDENTIALTemperatureinthecrystal

andinthemeltFEMAG-CZ/OXCZprocess

withInductionHeatingsystemCONFIDENTIALMeltvelocityamplitude

FEMAG-CZ/OXCZprocess

withInductionHeatingsystemTheinterfaceshapeandpositionisaresultofthesimulationFEMAGSoft?2012Temperature

fieldinthemeltStream

functionFEMAG-CZ/OX/CZandKYROPOULOSprocessFEMAGSoft?2012Meltmeshes

BLM(boundarylayermesh)Coarse

meshBLMmeshisveryimportanttosimulatetheinterfaceFEMAGSoft?2012LocaltemperaturefieldResultusingcoarsemeshResultusingBLMmeshBLMmeshenablesabetterpredictionofthecrystalisationinterfaceFEMAGSoft?2012VelocityfieldResultusingcoarsemeshResultusingBLMmeshCONFIDENTIALFEMAG-HEMFEMAG-HEMSoftwaretosimulateSapphireGrowthbyHeatExchangeMethodSpecifications:Temperatureinthesapphireand

inallfurnacecomponentsbysolvingtheglobalheattransferinthefurnace(radiation,conduction,convection).Flowvelocityinthesapphireliquidphase.Crystallizationfrontshape

AdvancedradiationheattransferinthesapphireGasconvectionAnisotropicthermalstressesinthecrystalCONFIDENTIALFEMAG-HEMFEMAGSoftCADtooltointroducethegeometryCONFIDENTIALFEMAG-HEMGlobalTemperatureinthefurnaceCONFIDENTIALFEMAG-HEMMeltconvectionDetailofmeltconvectionCONFIDENTIALFEMAG-HEMTemperaturedistributioninthecrystalandmeltfordifferenttimesVelocityamplitudedistributioninthemeltfordifferenttimesCONFIDENTIALAnisotropicThermalStress(HEMSapphireA-axis)FEMAG-HEMquasi-steadysimulati