噴射成形AlSn20Cu合金靶材制備工藝與組織控制研究摘要：本文研究了噴射成形AlSn20Cu合金靶材制備工藝與組織控制方法。采用柔性制模技術制備了20mm×20mm×3mm的AlSn20Cu靶材，采用X射線衍射儀、SEM、熱電偶儀等測試工具對其組織結構、物理力學性能進行了分析。結果顯示，合金中的Sn、Cu元素共晶固溶度限制了晶粒尺寸的增加，但粗大的銅基本不溶于鋁，利于增大晶粒尺寸；液相成分的增加導致了晶粒尺寸的尺寸的增加和形態的變化。在各種成形參數和陰陽極條件下，經過優化工藝，制備得到了晶粒較大、均勻的AlSn20Cu靶材，其顯微組織為均勻的細晶粒+富含Sn的粗晶組織，力學性能優異，證明了該工藝具有廣泛的應用前景。

關鍵詞：噴射成形；AlSn20Cu合金；靶材；組織控制；物理力學性能

Abstract:Inthispaper,thepreparationprocessandmicrostructurecontrolofAlSn20Cualloytargetmaterialbysprayformingwerestudied.TheAlSn20Cutargetwithasizeof20mm×20mm×3mmwaspreparedbyflexiblemoldtechnology,anditsmicrostructureandphysicalandmechanicalpropertieswereanalyzedbyXRD,SEM,TMAandothertestingtools.TheresultsshowedthattheeutecticsolubilityofSnandCuelementsinthealloylimitedthegrowthofgrainsize,butthelargeCuwashardlysolubleinAl,whichwasconducivetotheincreaseofgrainsize;theincreaseofliquidphasecontentledtotheincreaseofgrainsizeandthechangeofmorphology.Afteroptimizingtheformingparametersandcathode-anodeconditions,AlSn20Cutargetswithlargeanduniformgrainsizeswereobtained.ThemicrostructurewascomposedofuniformfinegrainsandcoarsegrainsrichinSn,andthemechanicalpropertieswereexcellent,whichprovedthattheprocesshadawideapplicationprospect.

Keywords:sprayforming;AlSn20Cualloy;target;microstructurecontrol;physicalandmechanicalpropertieSprayformingisaneffectivemethodforproducingtargetswithhighpurityanduniformmicrostructure.Inthisstudy,asprayformingprocesswasusedtofabricateAlSn20Cualloytargets.Theeffectsofprocessparametersonthemicrostructureandphysicalandmechanicalpropertiesofthetargetswereinvestigated.

Itwasfoundthatthegrainsizeandmorphologyofthetargetscouldbecontrolledbyadjustingthesprayformingparametersandcathode-anodeconditions.Theoptimizedformingparametersyieldedtargetswithlargeanduniformgrainsizes.ThemicrostructureofthetargetswascomposedofuniformfinegrainsandcoarsegrainsrichinSn.Themechanicalpropertiesofthetargetswereexcellent,whichdemonstratedthewideapplicationprospectsoftheprocess.

Insummary,thesprayformingprocessisaneffectivemethodformicrostructurecontrolandphysicalandmechanicalpropertyoptimizationofAlSn20Cualloytargets.Theresultsofthisstudyprovideabasisfortheapplicationofthetargetsinthefieldsofelectronics,aviation,andaerospaceMoreover,thesprayformingprocesscanalsobeusedforothertypesofalloysandmetals,suchastitaniumalloys,copperalloys,andnickelalloys.Thisprocesshasthepotentialtorevolutionizethemanufacturingindustrybycreatingmaterialswithsuperiorpropertiesandmicrostructures.Additionally,thesprayformingprocesscanincreasetheproductionefficiencyofhigh-qualityalloys,therebyreducingmanufacturingcostsandimprovingproductperformance.

Furthermore,thetechnologycanalsobeappliedtootherareassuchasthemedicalindustry,wherehigh-performancealloysarewidelyusedinorthopedicimplantsandprosthetics.Thesprayformingprocesscanproducematerialsthatarebiocompatible,corrosion-resistant,andpossesssuperiormechanicalproperties.Byusingsuchmaterialsinmedicalimplants,patientscanbenefitfromreducedhealingtime,enhancedbiointegration,andimprovedoverallqualityoflife.

Inconclusion,thesprayformingprocessisapromisingtechnologythatoffersgreatpotentialfortheproductionofhigh-performancealloys.Itsabilitytocontrolmicrostructureandoptimizemechanicalpropertieshaspavedthewayforawiderangeofapplicationsinvariousindustries.Withfurtherresearchanddevelopment,thesprayformingprocesscanrevolutionizethemanufacturingindustry,aswellasotherfieldssuchasmedicine,energy,andelectronics.ThefuturelooksbrightforthistechnologyasitcontinuestoadvanceandcreatenewopportunitiesformaterialengineersandmanufacturersalikeOneofthemostpromisingareasinwhichsprayformingcanrevolutionizethemanufacturingindustryisintheproductionofhigh-performancestructuralmaterials.Theaerospaceindustry,forinstance,demandsmaterialsthatarebothlightweightandstrong,withexcellenthigh-temperatureproperties.Sprayformingcanproducealloysthatmeetthesecriteriathroughtheoptimizationofmicrostructureandcomposition,resultinginstrongerandmoredurablematerialsthatcanwithstandextremeconditions.

Additionally,sprayformingcanbeusedtoproduceshape-memoryalloys(SMAs),whicharematerialsthatcanrecovertheiroriginalshapewhensubjectedtoheat.Thesealloyshaveseveralpotentialapplicationsinthebiomedicalfield,suchasinorthodonticbrackets,vascularstents,anddentalimplants.Theyalsohavepotentialusesinelectronics,includingactuators,sensors,andmicroelectromechanicalsystems(MEMS).

Anotherpromisingapplicationofsprayformingisintheproductionofhigh-puritymetallicpowdersforuseinadditivemanufacturing,particularlyinpowderbedfusiontechniquessuchasselectivelasermelting(SLM)andelectronbeammelting(EBM).Sprayformingcanproducepowderswithcontrolledparticlesize,morphology,andcomposition,whichcansignificantlyimprovethequalityofadditivelymanufacturedcomponents.Theresultingproductshavehigherdensities,fewerdefects,andbettermechanicalpropertiesthanthosemadefromconventionalpowders.

Apartfrommetallicmaterials,sprayformingcanalsobeusedtoproduceceramiccoatingsforuseinprotectiveandwear-resistantapplications.Theprocessinvolvessprayingamixtureofceramicpowdersandabinderontothesurfaceofasubstrate,whichisthensinteredtoobtainadenseanduniformcoating.Thistechnologyhaspotentialapplicationsintheautomotive,aerospace,andbiomedicalindustries,wherewear-resistantcoatingsarenecessa