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中華人民共和國國家標準

GB/T20510—2024

代替GB/T20510—2017

氧化銦錫靶材

Indium-tinoxidetarget

2024-09-29發布2025-04-01實施

國家市場監督管理總局發布

國家標準化管理委員會

GB/T20510—2024

目次

前言

·····································································································

Ⅲ

1

范圍

··································································································

1

2

規范性引用文件

······················································································

1

3

術語和定義

···························································································

1

4

分類

··································································································

2

5

技術要求

······························································································

2

5.1

化學成分

·························································································

2

5.2

物理性能

·························································································

3

5.3

尺寸規格及其偏差

···············································································

3

5.4

外觀質量

·························································································

3

5.5

內部質量

·························································································

3

6

試驗方法

······························································································

3

6.1

化學成分

·························································································

3

6.2

物理性能

·························································································

3

6.3

尺寸規格及其偏差

···············································································

4

6.4

外觀質量

·························································································

4

6.5

內部質量

·························································································

4

7

檢驗規則

······························································································

4

7.1

檢查和驗收

······················································································

4

7.2

組批

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4

7.3

檢驗項目

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4

7.4

取樣和制樣

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5

7.5

檢驗結果的判定

·················································································

6

8

標志、包裝、運輸、貯存及隨行文件

································································

6

8.1

標志

······························································································

6

8.2

包裝

······························································································

6

8.3

運輸與貯存

······················································································

6

8.4

其他

······························································································

6

8.5

隨行文件

·························································································

6

9

訂貨單內容

···························································································

7

Ⅰ

GB/T20510—2024

前言

本文件按照GB/T1.1—2020《標準化工作導則第1部分：標準化文件的結構和起草規則》的規

定起草。

本文件代替GB/T20510—2017《氧化銦錫靶材》。與GB/T20510—2017相比，除結構調整和編

輯性改動外，主要技術變化如下：

a）更改了適用范圍，將“適用于以99.99%金屬銦、錫為原料生產的氧化銦錫靶材”更改為“適用

于由In2O3和SnO2粉末按照一定比例混合，以常壓燒結工藝生產的氧化銦錫靶材”（見第

1章，2017年版的第1章）；

b）更改了“相對密度”的定義（見3.2，2017年版的3.2）；

c）刪除了“開爾文電橋”的術語和定義（見2017年版的3.3）；

d）更改了相對密度的內容（見3.2,2017年版的3.2）；

e）更改了分類方法，將按照相對密度分類方法更改為按照形狀和氧化銦和氧化錫的配比分類（見

第4章,2017年版的4.1）；

f）更改了主要化學成分的要求（見5.1.1,2017年版的4.2.1）；

g）更改了物理性能的要求（見5.2，2017年版的4.3）；

h）更改了尺寸規格及其允許偏差的內容（見5.3，2017年版的4.4）；

i）更改了外觀質量的要求（見5.4,2017年版的4.5）；

j）增加了內部質量的要求（見5.5）；

k）更改了化學成分分析方法（見6.1,2017年版的5.1）；

l）更改了相對密度和電阻率的檢測方法（見6.2.1和6.2.2，2017年版的5.2.1和5.2.2）；

m）更改了檢驗項目的內容（見7.3,2017年版的6.3）。

請注意本文件的某些內容可能涉及專利。本文件的發布機構不承擔識別專利的責任。

本文件由中國有色金屬工業協會提出。

本文件由全國有色金屬標準化技術委員會（SAC/TC243）歸口。

本文件起草單位：先導電子科技股份有限公司、株洲冶煉集團股份有限公司、廣西晶聯光電材料有

限責任公司、蕪湖映日科技股份有限公司、中山智隆新材料科技有限公司、株洲火炬安泰新材料有限公

司、深圳市中金嶺南有色金屬股份有限公司韶關冶煉廠、成都中建材光電材料有限公司、上海大學、

廣東歐萊高新材料股份有限公司、河北恒博新材料科技股份有限公司、廣東先導稀材股份有限公司、

福建阿石創新材料股份有限公司。

本文件主要起草人：朱世會、朱劉、童培云、覃雪蓮、黃誓成、曾墩風、葛春橋、蔣少英、

左鴻毅、鄭林、李喜峰、李鵬、李慶豐、陳文麟、余芳、朱贊芳、傅清波、黃作、王志強、李強、

劉慧明、曾平生、張建華、王慧河、駱勝磊、陳欽忠、王凱凱、張科。

本文件于2006年首次發布，2017年第一次修訂，本次為第二次修訂。

Ⅲ

GB/T20510—2024

氧化銦錫靶材

1范圍

本文件規定了氧化銦錫靶材（以下簡稱ITO靶材）的分類、技術要求、試驗方法、檢驗規則及標

志、包裝、運輸與貯存、隨行文件和訂貨單內容。

本文件適用于由In2O3和SnO2粉末按照一定比例混合，以常壓燒結工藝生產的氧化銦錫靶材，是制

作透明導電薄膜的核心材料。

2規范性引用文件

下列文件中的內容通過文中的規范性引用而構成本文件必不可少的條款。其中，注日期的引用文

件，僅該日期對應的版本適用于本文件；不注日期的引用文件，其最新版本（包括所有的修改單）適用

于本文件。

GB/T1551硅單晶電阻率的測定直排四探針法和直流兩探針法

GB/T3850致密燒結金屬材料與硬質合金密度測定方法

GB/T6569精細陶瓷彎曲強度試驗方法

GB/T8170數值修約規則與極限數值的表示和判定

GB/T13298金屬顯微組織檢驗方法

GB/T16535精細陶瓷線熱膨脹系數試驗方法